Mixed Oxide Sputtering Targets

Titanate, Zirconate, Ferrite, Garnet ...

Shape: Discs, Plates, Column Targets and other costom size
Max.Size: 18”disc

Rare Earth Ceramic Sputtering Targets

Ceramic sputtering targets of rare earth elements

Sc, Y, La, Ce, Pr, Nd, Sm

 Eu, Gd, Tb, Dy, Ho, Er, Tb, Yb, Lu

Oxide Sputtering Targets

Elements' oxide sputtering targets.                               

Ti2O3, ITO, ,IZO, AZO, Titanate, Zirconate, Garnets and other oxide sputtering targets

Titanium Dioxide (TiO2) Sputtering Targets (O>2)

Composition: Titanium Dioxide (TiO2)
Catalog No.:DPOX22ST
Purity:99.9% ~ 99.99%
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 Click here for the specifications of TiO2 sputter target

 Click here for the SDS document of TiO2 sputter target

ATO (Sb2O3/SnO2) Sputtering Targets

Composition: ATO (Sb2O3/SnO2)
Catalog No.:DPATOST
Purity:99.9% ~ 99.99%
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 Click here for the specifications of Sb2O3/SnO2 sputter target

 Click here for the SDS document of Sb2O3/SnO2 sputter target

Barium Strontium Titanate (Ba0.5Sr0.5TiO3) Sputtering Targets

Composition: Barium Strontium Titanate (Ba0.5Sr0.5TiO3)
Catalog No.:DPOX56ST
Purity:99.90%
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 Click here for the specifications of Ba0.5Sr0.5TiO3 sputter target

 Click here for the SDS document of Ba0.5Sr0.5TiO3 sputter target

Barium Titanate (BaTiO3) Sputtering Targets

Composition: Barium Titanate (BaTiO3)
Catalog No.:DPOX56ST
Purity:99.9% ~ 99.99%
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 Click here for the specifications of BaTiO3 sputter target

 Click here for the SDS document of BaTiO3 sputter target

Barium Zirconate (BaZrO3) Sputtering Targets

Composition: Barium Zirconate (BaZrO3)
Catalog No.:DPOX56ST
Purity:99.90%
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 Click here for the specifications of BaZrO3 sputter target

 Click here for the SDS document of BaZrO3 sputter target

Bismuth Ferrite (BiFeO3) Sputtering Targets

Composition: Bismuth Ferrite (BiFeO3)
Catalog No.:DPOX83ST
Purity:99.90%
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 Click here for the specifications of BiFeO3 sputter target

 Click here for the SDS document of BiFeO3 sputter target

Bismuth Ferrite (Garnet, Bi3Fe5O12) Sputtering Targets

Composition: Bismuth Ferrite (Bi3Fe5O12)
Catalog No.:DPOX83ST
Purity:99.9% ~ 99.99%
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 Click here for the specifications of Bi3Fe5O12 sputter target

 Click here for the SDS document of Bi3Fe5O12 sputter target

Bismuth Titanate (Bi4Ti3O12) Sputtering Targets

Composition: Bismuth Titanate (Bi4Ti3O12)
Catalog No.:DPOX83ST
Purity:99.90%
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 Click here for the specifications of Bi4Ti3O12 sputter target

 Click here for the SDS document of Bi4Ti3O12 sputter target

Copper Aluminum Oxide (CuAlO2) Sputtering Targets

Composition: Copper Aluminum Oxide (CuAlO2)
Catalog No.:DPOX29ST
Purity:99.9% ~ 99.99%
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 Click here for the specifications of CuAlO2 sputter target

 Click here for the SDS document of CuAlO2 sputter target

Lanthanum Aluminate (LaAlO3) Sputtering Targets

Composition: Lanthanum Aluminate (LaAlO3)
Catalog No.:DPOX57ST
Purity:99.90%
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 Click here for the specifications of LaAlO3 sputter target

 Click here for the SDS document of LaAlO3 sputter target

Lanthanum Manganate (LaMnO3) Sputtering Targets

Composition: Lanthanum Manganate (LaMnO3)
Catalog No.:DPOX57ST
Purity:99.90%
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 Click here for the specifications of LaMnO3 sputter target

 Click here for the SDS document of LaMnO3 sputter target

Lanthanum Nickel Oxide (LaNiO3) Sputtering Targets

Composition: Lanthanum Nickel Oxide (LaNiO3)
Catalog No.:DPOX57ST
Purity:99.90%
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 Click here for the specifications of LaNiO3 sputter target

 Click here for the SDS document of LaNiO3 sputter target

Lanthanum Niobium Oxide (LaNbO3) Sputtering Targets

Composition: Lanthanum Niobium Oxide (LaNbO3)
Catalog No.:DPOX57ST
Purity:99.90%
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 Click here for the specifications of LaNbO3 sputter target

 Click here for the SDS document of LaNbO3 sputter target

IGZO (Indium Gallium Zinc Oxide) Sputtering Targets

Composition: IGZO (Indium Gallium Zinc Oxide)
Catalog No.:DPOX49ST
Purity:99.9% ~ 99.99%
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 Click here for the specifications of Indium Gallium Zinc Oxide sputter target

 Click here for the SDS document of Indium Gallium Zinc Oxide sputter target

Lanthanum Vanadium Oxide (LaVO3) Sputtering Targets

Composition: Lanthanum Vanadium Oxide (LaVO3)
Catalog No.:DPOX57ST
Purity:99.90%
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 Click here for the specifications of LaVO3 sputter target

 Click here for the SDS document of LaVO3 sputter target

Lead Titanate (PbTiO3) Sputtering Targets

Composition: Lead Titanate (PbTiO3)
Catalog No.:DPOX82ST
Purity:99.90%
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 Click here for the specifications of PbTiO3 sputter target

 Click here for the SDS document of PbTiO3 sputter target

Lead Zirconium Titanate (PbZr0.52Ti0.48O3) Sputtering Targets

Composition: Lead Zirconium Titanate (PbZr0.52Ti0.48O3)
Catalog No.:DPOX82ST
Purity:99.90%
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 Click here for the specifications of PbZr0.52Ti0.48O3 sputter target

 Click here for the SDS document of PbZr0.52Ti0.48O3 sputter target