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QS Advanced Materials Inc
599 Thurber Dr, Troy MI 48085
Sales@QSAdvancedMaterials.com
Tel: 866-279-7170
Boron Nitride Liners
Material Brand: BN99, TPBN, HBN, AlN-BN, ZCBN
Purity: 99.5% (BN99)
Additive: <0.5 wt% (BN99, TPBN)
Available max. size: 16" x16" x8"
- Product Details
Advantage of BN Liner
Boron nitride ceramics is a series of materials that have great electric insulating, low dielectric constant, and high dielectric strength. In general, it is an ideal material for insulators to be used in PVD equipment, that needs to constrain the electric arc towards the target and protect the other liners in the vacuum chamber. With relatively lower wettability of metal, solid metal attached on the BN liners could be removed easier.
Composite Materials available for BN Liners
In addition to pure boron nitride, QSAM has also developed a variety of BN based composite materials. The composite of boron nitride and aluminum nitride AlN-BN has higher much mechanical strength and higher thermal conductivity than pure boron nitride. Although BN liners made by these composite materials are more expensive and difficult to process, their service life is significantly longer in a lot of circumstance.
List of boron nitride material for BN liner
BN99 (Data Sheet) |
>99% Pure boron nitride material |
BN-SiC (Data Sheet) |
SiC enhanced boron nitride |
BN-AlN (Data Sheet) |
Aluminum Nitride enhanced BN |
CBN (Data Sheet) |
CaO enhanced BN, Similar with HBN |
ZCBN (Data Sheet) |
Zirconia enhanced BN |
PBN (Data Sheet) |
Pyrolytic boron nitride/CVD boron nitride |
Because boron nitride is a machinable ceramic material, we can make it according to the drawings in about 2 weeks. Please click inquiry to send us message and upload a drawing if necessary.
BN liner Packaging
As a ceramic material, boron nitride is quite fragile in a lot of cases. The BN liner are usually hold in plastic bags by vacuum, and protect with heavy foam.
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