Mixed Oxide Sputtering Targets

Titanate, Zirconate, Ferrite, Garnet ...

Shape: Discs, Plates, Column Targets and other costom size
Max.Size: 18”disc

Product Details

General Introduction

Mixed oxide compounds are sometimes treated as salts, as it looks like a metal ion with a oxyacid group, such as LaCrO3. For composite oxide sputter targets, they are in most of cases produced by well mix the fine oxide powder together and hot press it under high enough temperature, that could allow re-crystallization. Thus, the cost is much higher than normal oxide sputter targets, and requires lot of experience to make a single phase sputter target with enough density.

Our Sputter target product line

QSAM is a professional supplier of custom manufactured R&D equipments and materials. Our batch hot pressors could produce specified composition material in a relatively short time with competative price. Sputter targets of mixed oxides could be made in a range of 1" ~ 12" diameter, determined by the property of material.

Barium Strontium Titanate Ba Sr TiO3 sputter target

YIG yttrium iron garnet sputter target

List of our regular sputter targets

*Other composition could be available

Composition	Purity (REM)	Catalog No.	Typical Lead Time
ATO (Sb2O3/SnO2) Sputtering Targets	99.9% ~ 99.99%	DPOX51ST	5 weeks
Barium Strontium Titanate (Ba0.5Sr0.5TiO3) Sputtering Targets	99.9%	DPOX56ST	5 weeks
Barium Titanate (BaTiO3) Sputtering Targets	99.9% ~ 99.99%	DPOX56ST	5 weeks
Barium Zirconate (BaZrO3) Sputtering Targets	99.9%	DPOX56ST	5 weeks
Bismuth Ferrite (BiFeO3) Sputtering Targets	99.9%	DPOX83ST	5 weeks
Bismuth Ferrite (Garnet, Bi3Fe5O12) Sputtering Targets	99.9% ~ 99.99%	DPOX83ST	5 weeks
Bismuth Titanate (Bi4Ti3O12) Sputtering Targets	99.9%	DPOX83ST	5 weeks
Copper Aluminum Oxide (CuAlO2) Sputtering Targets	99.9% ~ 99.99%	DPOX29ST	5 weeks
Lanthanum Aluminate (LaAlO3) Sputtering Targets	99.9%	DPOX57ST	4 weeks
Lanthanum Manganate (LaMnO3) Sputtering Targets	99.9%	DPOX57ST	4 weeks
Lanthanum Nickel Oxide (LaNiO3) Sputtering Targets	99.9%	DPOX57ST	4 weeks
Lanthanum Niobium Oxide (LaNbO3) Sputtering Targets	99.9%	DPOX57ST	4 weeks
IGZO (Indium Gallium Zinc Oxide) Sputtering Targets	99.9% ~ 99.99%	DPOX49ST	5 weeks
Lanthanum Titanate (LaTiO3) Sputtering Targets	99.9%	DPOX57ST	4 weeks
Lanthanum Vanadium Oxide (LaVO3) Sputtering Targets	99.9%	DPOX57ST	4 weeks
Lead Titanate (PbTiO3) Sputtering Targets	99.9%	DPOX82ST	5 weeks
Lead Zirconate (PbZrO3) Sputtering Targets	99.9%	DPOX82ST	5 weeks
Lead Zirconium Titanate (PbZr0.52Ti0.48O3) Sputtering Targets	99.9%	DPOX82ST	5 weeks
Lithium Cobalt Oxide (LiCoO2) Sputtering Targets	99.7%	DPOX3ST	5 weeks
Lithium Niobate (LiNbO3) Sputtering Targets	99.9%	DPOX3ST	5 weeks
Lithium Phosphate (Li3PO4) Sputtering Targets	99.9% ~ 99.95%	DPOX3ST	5 weeks
Strontium Ruthanate (SrRuO3) Sputtering Targets	99.9%	DPOX38ST	5 weeks
Strontium Titanate (SrTiO3) Sputtering Targets	99.9%	DPOX38ST	5 weeks
Strontium Zirconate (SrZrO3) Sputtering Targets	99.9%	DPOX38ST	5 weeks